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Karl Suss PM5 Wafer Probe station , 6" Chuck

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Product Description

PM5 Manual Probe Station, 6" Chuck
  • Wafer/Substrate size up to 6”/150 diameter
  • X, Y, Theta Stage
  • Planarity over 6” <10 µm
  • Resolution 5 µm
  • Mitutoyo FS60 Trinocular Microscope.
  • Mitutoyo Mplan APO 2x Objective.
  • Mitutoyo Mplan APO 10x Objective (optional).
  • Mitutoyo Mplan APO 20x Objective(optional).
  • Mitutoyo 10x WF Eyepieces (2).
  • Light Power Supply Fiber Optic Illuminator Cable.
  • Dimensions & Weight Width x Depth x Height 490 x 490 x 480 mm
  • Weight 60 kg

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